Layer termination from ellipsometric facts is fully integrated into Aeres®. A variety of multi-wavelength and spectroscopic ellipsometry options can be obtained Along with the ion beam sputter deposition method.
In-situ optical checking and Handle is available via Angstrom’s optical monitoring & Command offer.
An optional cryogenic pump improves base force and pumping pace and might be isolated with the chamber for the duration of reactive processes with oxygen.
In-situ ellipsometry provides crucial information on the effectiveness of an optical movie whilst it's getting deposited.
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If it’s off by even fifty percent a degree, it's going to have an effect on the morphology of such nanostructures substantially.
Angstrom went to fantastic lengths to refine the tolerances of the tilt angle, bettering it from a variation of as much as a complete diploma on non-Angstrom methods I’ve utilized to under 0.
Our one of a kind design and style permits direct or oblique checking of your variable angle phase, reducing the necessity for tooling variables or possibly a witness glass changer. Learn more regarding the Optical Checking & Handle bundle below.
IBSD processes may use a secondary ion source for substrate cleaning and energetic help, substrate heating for reactive deposition, and in-situ optical monitoring or ellipsometry for vital layer thickness termination.
All standard Reticle® platforms include an additional gridless conclude-Hall ion resource with hollow cathode neutralizer.
The deposition ion supply is directed towards a cloth concentrate on that has been optimized in both of those sizing and place with the required deposition geometry.
Self-aligned ion optics are configured specifically for the specified deposition demands and geometry of your respective course of action.
A very low-frequency neutralizer assures stable beam operation devoid of contamination from a traditional filament.
Dynamic uniformity shaping is attained utilizing a flux correction defend concerning the deposition source along with the substrate.
Thoughtful design and style of the ion beam focusing optics confines the beam totally to the realm Rare metals for aerospace with the goal, doing away with any possibility of contamination.